Patent · US Active

Device and method for range-resolved determination of scattered light, and an illumination mask

US7755748B2 · kind B2 · utility

2Cited by

5References

26Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michael Arnz · Oberkochen, DE
Oswald Gromer · Heidenheim, DE
Gerd Klose · Hamburg, DE
Joachim Stuehler · Aalen, DE
Matthias Manger · Neukochen, DE

Key dates

Filing date	Jul 29, 2008
Grant date	Jul 13, 2010
Priority date	—
Expiry date	Jul 29, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70941
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A scattered light measurement device includes an illumination mask providing measuring radiation on an entrance side (1a) of a test component (1) and a detection part (3-6) for detection of light scattered by the test component and disposed on an exit side (1b) of the test component. The illumination mask includes at least one scattered light measurement structure, wherein the scattered light measurement structure has a scattered light marker zone and wherein the scattered light marker zone has a rotationally non-symmetric shape.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.