Nanocomposite films
US7758708B2 · kind B2 · utility
2Cited by
3References
15Claims
0Family size
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Key dates
| Filing date | Jul 31, 2007 |
| Grant date | Jul 20, 2010 |
| Priority date | — |
| Expiry date | Jun 10, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12431
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A thin-film composition of nanocrystal molybdenum in an amorphous metallic matrix may be formed by co-sputtering Mo with aluminum or nickel. NEMS cantilevers may be formed from the film. The films exhibit high nanoindentation hardness and a reduction in roughness and intrinsic stress, while maintaining resistivity in the metallic range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.