Controlling shape of a reticle with low friction film coating at backside
US7759024B2 · kind B2 · utility
0Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2007 |
| Grant date | Jul 20, 2010 |
| Priority date | — |
| Expiry date | Oct 7, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B27/62
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In an embodiment of the invention, an apparatus includes a reticle having a frontside including a pattern to be imaged onto a semiconductor wafer, a thin film located over a backside of the reticle to form a global convex shape and to reduce friction when sliding on a chuck, and the chuck having a topside to which the backside of the reticle conforms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.