Patent · US Active

Method of forming probe card assembly

US7759952B2 · kind B2 · utility

4Cited by
15References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 14, 2007
Grant dateJul 20, 2010
Priority date
Expiry dateNov 22, 2027

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/53243
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A probe card assembly has a probe contactor substrate having a plurality of probe contactor tips thereon and a probe card wiring board with an interposer disposed between the two. Support posts contacting the probe contactor substrate are vertically adjustable until secured by a locking mechanism which is coupled to the probe card wiring board. When the posts are secured in a fixed position, the position is one in which the plane of the plurality of probe contactor substrates is substantially parallel to a predetermined reference plane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.