Integrated differential pressure sensor and manufacturing process thereof
US7763487B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 4, 2006 |
| Grant date | Jul 27, 2010 |
| Priority date | — |
| Expiry date | Mar 25, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L13/025
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for manufacturing an integrated differential pressure sensor includes forming, in a monolithic body of semiconductor material having a first face and a second face, a cavity extending at a distance from the first face and delimiting therewith a flexible membrane, forming an access passage in fluid communication with the cavity, and forming, in the flexible membrane, at least one transduction element configured so as to convert a deformation of the flexible membrane into electrical signals. The cavity is formed in a position set at a distance from the second face and delimits, together with the second face, a portion of the monolithic body. In order to form the access passage, the monolithic body is etched so as to form an access trench extending through it.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.