Lithographic apparatus and device manufacturing method
US7764356B2 · kind B2 · utility
1Cited by
18References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2008 |
| Grant date | Jul 27, 2010 |
| Priority date | — |
| Expiry date | Sep 26, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70925
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An immersion lithographic apparatus is disclosed having comprising a pump and buffer volume configured to remove remaining liquid from a substrate, the pump and the buffer volume configured to generate a vacuum cleaning gas flow near the substrate by gas suction into the buffer volume. In an embodiment, since gas flow is needed only a limited amount of time (ordinarily less than 5%), evacuation may be performed using only a moderately powered vacuum pump. In addition or alternatively, the buffer volume may be used as a backup volume buffer configured to provide gas vacuum suction, e.g., in case of a vacuum supply outage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.