Pattern inspection apparatus and method with enhanced test image correctability using frequency division scheme
US7764825B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 6, 2006 |
| Grant date | Jul 27, 2010 |
| Priority date | — |
| Expiry date | May 10, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A pattern image inspection apparatus with enhanced image correctability due to consolidation of alignment and image correction by using an image as divided by frequency regions while reducing image degradation and setup parameters is disclosed. The apparatus includes an image divider for creating for the test image and the reference image a plurality of frequency division images divided into frequency regions, a model parameter identifier for using 2D linear prediction models of the test image and the reference image to identify model parameters for each frequency division image, a model image generator for creating a model image based on the model parameters, and a comparison processor for performing inspection by comparing the model image to either the test image or the reference image with respect to each frequency division image. An image inspection method is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.