Patent assignee · JP · COMPANY

Advanced Mask Inspection Technology Inc.

24Patents
21Active
24Granted
47Portfolio score

Filing activity: Nov 3, 2005 → Jun 11, 2009 · 21 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7487491B2 Pattern inspection system using image correction scheme with object-sensitive automatic mode switchability Physics 9 Active
US7630535B2 Die-to-die photomask defect detection using region data to modify inspection thresholds Physics 8 Active
US7639863B2 Die-to-database photomask defect detection using region data to modify inspection thresholds Physics 6 Active
US7796803B2 Image correction method and apparatus for use in pattern inspection system Physics 5 Active
US7664308B2 Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limits Physics 5 Active
US7655904B2 Target workpiece inspection apparatus, image alignment method, and computer-readable recording medium with program recorded thereon Physics 5 Active
US7809181B2 Pattern inspection apparatus, image alignment method, displacement amount estimation method, and computer-readable recording medium with program recorded thereon Physics 4 Active
US7565032B2 Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection Physics 3 Active
US7756318B2 Pattern inspection apparatus and method with local critical dimension error detectability Physics 2 Active
US7787686B2 Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection Physics 2 Active
US7539222B2 Method of operating laser light source Physics 2 Expired
US7643668B2 Workpiece inspection apparatus, workpiece inspection method and computer-readable recording medium storing program Physics 2 Active
US7577288B2 Sample inspection apparatus, image alignment method, and program-recorded readable recording medium Physics 2 Active
US7764825B2 Pattern inspection apparatus and method with enhanced test image correctability using frequency division scheme Physics 2 Active
US7275006B2 Workpiece inspection apparatus assisting device, workpiece inspection method and computer-readable recording media storing program therefor Physics 2 Expired
US7656516B2 Pattern inspection apparatus Physics 2 Active
US7781749B2 Beam irradiation apparatus with deep ultraviolet light emission device for lithographic pattern inspection system Physics 2 Active
US7495779B2 Level detection apparatus Physics 1 Active
US7388660B2 Light amount measurement device and light amount measurement method Physics 1 Active
US7495756B2 Pattern inspection apparatus Physics 1 Expired
US7706623B2 Image correcting method Physics 1 Active
US7627164B2 Pattern inspection method and apparatus with high-accuracy pattern image correction capability Physics 1 Active
US7627165B2 Pattern inspection method and apparatus using linear predictive model-based image correction technique Physics 0 Active
US7539350B2 Image correction method Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.