Advanced Mask Inspection Technology Inc.
24Patents
21Active
24Granted
47Portfolio score
Filing activity: Nov 3, 2005 → Jun 11, 2009 · 21 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7487491B2 | Pattern inspection system using image correction scheme with object-sensitive automatic mode switchability | Physics | 9 | Active |
| US7630535B2 | Die-to-die photomask defect detection using region data to modify inspection thresholds | Physics | 8 | Active |
| US7639863B2 | Die-to-database photomask defect detection using region data to modify inspection thresholds | Physics | 6 | Active |
| US7796803B2 | Image correction method and apparatus for use in pattern inspection system | Physics | 5 | Active |
| US7664308B2 | Photomask inspection apparatus comparing optical proximity correction patterns to minimum and maximum limits | Physics | 5 | Active |
| US7655904B2 | Target workpiece inspection apparatus, image alignment method, and computer-readable recording medium with program recorded thereon | Physics | 5 | Active |
| US7809181B2 | Pattern inspection apparatus, image alignment method, displacement amount estimation method, and computer-readable recording medium with program recorded thereon | Physics | 4 | Active |
| US7565032B2 | Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection | Physics | 3 | Active |
| US7756318B2 | Pattern inspection apparatus and method with local critical dimension error detectability | Physics | 2 | Active |
| US7787686B2 | Image density-adapted automatic mode switchable pattern correction scheme for workpiece inspection | Physics | 2 | Active |
| US7539222B2 | Method of operating laser light source | Physics | 2 | Expired |
| US7643668B2 | Workpiece inspection apparatus, workpiece inspection method and computer-readable recording medium storing program | Physics | 2 | Active |
| US7577288B2 | Sample inspection apparatus, image alignment method, and program-recorded readable recording medium | Physics | 2 | Active |
| US7764825B2 | Pattern inspection apparatus and method with enhanced test image correctability using frequency division scheme | Physics | 2 | Active |
| US7275006B2 | Workpiece inspection apparatus assisting device, workpiece inspection method and computer-readable recording media storing program therefor | Physics | 2 | Expired |
| US7656516B2 | Pattern inspection apparatus | Physics | 2 | Active |
| US7781749B2 | Beam irradiation apparatus with deep ultraviolet light emission device for lithographic pattern inspection system | Physics | 2 | Active |
| US7495779B2 | Level detection apparatus | Physics | 1 | Active |
| US7388660B2 | Light amount measurement device and light amount measurement method | Physics | 1 | Active |
| US7495756B2 | Pattern inspection apparatus | Physics | 1 | Expired |
| US7706623B2 | Image correcting method | Physics | 1 | Active |
| US7627164B2 | Pattern inspection method and apparatus with high-accuracy pattern image correction capability | Physics | 1 | Active |
| US7627165B2 | Pattern inspection method and apparatus using linear predictive model-based image correction technique | Physics | 0 | Active |
| US7539350B2 | Image correction method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.