Patent · US Active

Barrier formation and structure to use in semiconductor devices

US7768126B2 · kind B2 · utility

1Cited by
5References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 29, 2006
Grant dateAug 3, 2010
Priority date—
Expiry dateMar 10, 2027

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Embodiments of barriers to use in semiconductor devices are presented herein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.