Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques
US7768624B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Apr 2, 2007 |
| Grant date | Aug 3, 2010 |
| Priority date | — |
| Expiry date | Jun 11, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7092
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is directed towards a method for determining deformation parameters that a patterned device would undergo to minimize dimensional variations between a recorded pattern thereon and a reference pattern, the method including, inter alia, comparing spatial variation between features of the recorded pattern with respect to corresponding features of the reference pattern; and determining deformation forces to apply to the patterned device to attenuate the dimensional variations, with the forces having predetermined constraints, wherein a summation of a magnitude of the forces is substantially zero and a summation of moment of the forces is substantially zero.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.