Patent · US Active

Method for correcting measuring errors caused by the lens distortion of an objective

US7769556B2 · kind B2 · utility

1Cited by

5References

8Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Michael Heiden · Blieskastel, DE
Klaus-Dieter Adam · Jena, DE

Key dates

Filing date	Sep 3, 2008
Grant date	Aug 3, 2010
Priority date	—
Expiry date	Nov 29, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01M11/0257
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for correcting the measuring errors caused by the lens distortion of an objective in a coordinate measuring machine is disclosed. For a plurality of different types of structures, the lens distortion caused by an objective is determined in an image field of the objective. The position of a type of structure is determined in the image field of the objective by a measuring window. The correction of the lens distortion required for the type of structure to be measured is retrieved from the database as a function of the type of structure to be measured.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.