Patent · US Active

CMOS image sensor and method for manufacturing the same

US7772666B2 · kind B2 · utility

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3Claims
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Assignee

Inventor

Key dates

Filing dateDec 26, 2006
Grant dateAug 10, 2010
Priority date
Expiry dateAug 30, 2028

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F39/8063

Abstract

A CMOS image sensor and a method for manufacturing the same are provided. The CMOS image sensor may be capable of improved thickness uniformity form microlenses formed at a reduced distance from the photodiodes. The CMOS image sensor can include: a semiconductor substrate on which a pixel array is formed, the pixel array including photodiodes formed on the semiconductor substrate to different depths for sensing red, green, and blue signals, respectively; an interlayer dielectric formed on the semiconductor substrate and having a trench at an upper portion of the pixel array; an insulating layer sidewall formed at a side of the trench; and a plurality of microlenses formed on the interlayer dielectric in the trench at predetermined intervals.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.