Method for fabricating wafer level chip scale packages
US7776649B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | May 1, 2009 |
| Grant date | Aug 17, 2010 |
| Priority date | — |
| Expiry date | May 1, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/15311
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for fabricating a plurality of wafer level chip scale packages is revealed. A bumped wafer is laminated with a mold plate with a protection film placed thereon to partially embed the bumps of the wafer into the protection film and to form an underfill gap between the wafer and the protection film. By a first sawing step, the wafer fixed by the protection film is singulated into a plurality of chips having sides between the active surface and the back surface and also a filling gap is formed between the sides. Then, an encapsulant is formed on the protection film where the encapsulant fills the underfill gap through the filling gap to completely encapsulate the chips and the non-embedded portions of the bumps. By separating the encapsulant from the protection film and a second sawing step, the mold plate and the protection film are removed, and the encapsulant is singulated into a plurality of individual wafer level chip scale packages.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.