Side seal for wet lens elements
US7781029B2 · kind B2 · utility
3Cited by
19References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2006 |
| Grant date | Aug 24, 2010 |
| Priority date | — |
| Expiry date | May 15, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T156/10
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.