Probe card analysis system and method
US7782071B2 · kind B2 · utility
1Cited by
12References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 19, 2007 |
| Grant date | Aug 24, 2010 |
| Priority date | — |
| Expiry date | Dec 19, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R35/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.