Patent · US Active

Encapsulated microcomponent equipped with at least one getter

US7786561B2 · kind B2 · utility

4Cited by

1References

7Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Jean-Louis Pornin · Crolles, FR
Charlotte Gillot · Grenoble, FR
Francois Baleras · Seyssinet-Pariset, FR

Key dates

Filing date	Jul 6, 2007
Grant date	Aug 31, 2010
Priority date	—
Expiry date	Jul 6, 2027

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0145
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

The invention relates to an encapsulated microcomponent having a cover (3) delimiting a sealed cavity (4) equipped with at least one orifice (5) provided with a plug (6). The plug (6) comprises a getter material portion (6.1) exposed inside the cavity (4).Application in particular in MEMS.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.