Systems and methods for inspecting a specimen with light at varying power levels
US7787114B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2007 |
| Grant date | Aug 31, 2010 |
| Priority date | — |
| Expiry date | Sep 23, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0683
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for inspecting a specimen with light at varying power levels are provided. One system configured to inspect a specimen includes a light source configured to generate light. The system also includes a power attenuator subsystem configured to alter a power level of the light directed to the specimen during inspection between at least two power levels including a full power level and a minimum power level equal to or greater than about 10% of the full power level. In addition, the system includes a detection subsystem configured to generate output responsive to the light scattered from the specimen. The output can be used to detect defects on the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.