Systems configured to perform a non-contact method for determining a property of a specimen
US7788629B2 · kind B2 · utility
4Cited by
13References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 14, 2005 |
| Grant date | Aug 31, 2010 |
| Priority date | — |
| Expiry date | Aug 8, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Systems configured to perform a non-contact method for determining a property of a specimen are provided. One system configured to perform a non-contact method for determining a property of a specimen includes a focused biasing device configured to provide a stimulus to a focused spot on the specimen. The system also includes a sensor configured to measure a parameter of a measurement spot on the specimen. The measurement spot overlaps the focused spot. The system further includes a processor configured to determine the property of the specimen from the parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.