Planarizing probe card
US7791361B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2007 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Dec 10, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A novel planarizing probe card for testing a semiconductor device is presented. The probe card is adapted to come into contact with a probe card mount that is in adjustable contact with the prober. The probe card includes a printed circuit board affixed to a stiffener and a probe head that is in electrical contact with the printed circuit board. The probe head also includes a plurality of probe contactor tips that define a first plane. The stiffener further contains at least two planarizing adjusters that comes into contact with the probe card mount. The adjusters may be actuated to alter the position of first plane. A surface of the semiconductor device under test may define a second plane, and the adjusters may be adjusted to position the first plane to be substantially parallel to the second plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.