Low temperature probing apparatus
US7791363B2 · kind B2 · utility
1Cited by
3References
25Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 11, 2009 |
| Grant date | Sep 7, 2010 |
| Priority date | — |
| Expiry date | Apr 14, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2877
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A low temperature probing apparatus comprises a housing, a device holder positioned in the housing and configured to receive at least one semiconductor device under test, a platen positioned on the housing, at least one hydraulic stage positioned on the platen and configured to retain at least one probe, a cover positioned on the platen and configured to form an isolation chamber with the hydraulic stage and the device holder positioned therein, and a hydraulic controller configured to control the movement of the hydraulic stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.