Method and system for detection of solid materials in a plasma using an electromagnetic circuit
US7794663B2 · kind B2 · utility
1Cited by
27References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 19, 2004 |
| Grant date | Sep 14, 2010 |
| Priority date | — |
| Expiry date | Sep 29, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/023
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for solid material detection in a medium includes receiving an exhaust gas downstream with respect to a workpiece from which a photoresist material is removed. An electromagnetic circuit is configured to include the exhaust gas, the exhaust gas is excited with electromagnetic energy and an impedance value of the electromagnetic circuit is determined, wherein the impedance value corresponds to an amount of solid material within the exhaust gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.