Patent · US Active

Integrated microphone

US7795695B2 · kind B2 · utility

115Cited by

63References

20Claims

0Family size

Assignee

Analog Devices, Inc. · US

Inventors

Jason W. Weigold · Somerville, US
John R. Martin · Foxborough, US
Timothy J. Brosnihan · Natick, US

Key dates

Filing date	Sep 27, 2006
Grant date	Sep 14, 2010
Priority date	—
Expiry date	Apr 6, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH04R19/04
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.