Inventor · Natick, MA, US

Timothy J. Brosnihan

36Patents
10h-index
33Co-inventors
75Inventor score

Filing activity: Jun 13, 1997 → Oct 3, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US7825484B2 Micromachined microphone and multisensor and method for producing same Electricity 135 Active
US7795695B2 Integrated microphone Electricity 115 Active
US7405852B2 Display apparatus and methods for manufacture thereof Physics 89 Active
US6121552A Microfabricated high aspect ratio device with an electrical isolation trench Physics 85 Expired
US6960488B2 Method of fabricating a microfabricated high aspect ratio device with electrical isolation Physics 69 Expired
US7338614B2 Vapor HF etch process mask and method Electricity 39 Expired
US7138694B2 Single crystal silicon sensor with additional layer and method of producing the same Physics 37 Expired
US7999994B2 Display apparatus and methods for manufacture thereof Physics 25 Active
US8526096B2 Mechanical light modulators with stressed beams Physics 20 Active
US8227876B2 Single crystal silicon sensor with additional layer and method of producing the same Physics 18 Active
US8129803B2 Micromachined microphone and multisensor and method for producing same Electricity 9 Active
US7327003B2 Sensor system Electricity 6 Expired
US9182587B2 Manufacturing structure and process for compliant mechanisms Physics 5 Active
US8169042B2 Integrated microphone Electricity 5 Active
US8227286B2 Single crystal silicon sensor with additional layer and method of producing the same Physics 4 Active
US9128277B2 Mechanical light modulators with stressed beams Physics 4 Active
US7491566B2 Method of forming a device by removing a conductive layer of a wafer Performing Operations; Transporting 2 Active
US9213181B2 MEMS anchor and spacer structure Emerging Cross-Sectional Technologies 2 Active
US9176317B2 Display apparatus incorporating dual-level shutters Physics 2 Active
US9632307B2 MEMS shutter assemblies for high-resolution displays Physics 1 Active
US9170421B2 Display apparatus incorporating multi-level shutters Physics 1 Active
US9134530B2 Display apparatus incorporating dual-level shutters Performing Operations; Transporting 1 Active
US9201236B2 Display apparatus with stiction reduction features Physics 1 Active
US10623852B2 MEMS devices and processes Electricity 1 Active
US9122047B2 Preventing glass particle injection during the oil fill process Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.