Configuration and methods for manufacturing time-of-flight MEMS mass flow sensor
US7797997B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 2008 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Dec 20, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F25/10
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention discloses a mass flow sensor manufactured by applying the micro-electromechanical system (MEMS) process to provide a new and improved mass flow sensor that is a self-calibrated in a time-of-flight manner with configuration to measure the flow velocity directly. The self-calibration of a mass flow rate sensor is achieved by providing an electric pulse to a heater in the flow and determining a temperature variations of the fluid. The method further includes a step of measuring a temperature variation by a temperature sensor disposed at a short distance from the heater. The method further includes a step of correlating the temperature variation measured at the temperature sensor with the temperature variation of the heater to determine a time delay and a corresponding flow velocity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.