Chucking system for nano-manufacturing
US7798801B2 · kind B2 · utility
13Cited by
37References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2005 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Aug 2, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/887
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention is directed towards a chucking system, including, inter alia, a body having a surface with a pin extending therefrom having a throughway defined therein, and a land surrounding the protrusions defining a channel between the pin and the land. In a further embodiment, the body comprises a plurality of protrusions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.