Shower plate having projections and plasma CVD apparatus using same
US7799134B2 · kind B2 · utility
1Cited by
11References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 18, 2005 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | May 4, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3244
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A shower plate 122 has protrusions 22 formed on the front face used with a first electrode in a plasma CVD apparatus. A plane-surface portion 23 is left around apertures of gas inlet holes 21 formed in the shower plate 122. With protrusions 22 being formed, a surface area of the first electrode is increased.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.