Method for growing a back surface contact on an imaging detector used in conjunction with back illumination
US7800040B2 · kind B2 · utility
29Cited by
9References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 21, 2007 |
| Grant date | Sep 21, 2010 |
| Priority date | — |
| Expiry date | Dec 29, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/199
Abstract
A method is provided for growing a back surface contact on an imaging detector used in conjunction with back illumination. In operation, an imaging detector is provided. Additionally, a back surface contact (e.g. a delta-doped layer, etc.) is grown on the imaging detector utilizing a process that is performed at a temperature less than 450 degrees Celsius.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.