Patent · US Active

Faceted mirror apparatus

US7802891B2 · kind B2 · utility

1Cited by

3References

58Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Andreas Seifert · Aalen, DE
Markus Weiss · Aalen, DE
Andreas Heisler · Steinheim, DE
Stefan Dornheim · Heidenheim, DE

Key dates

Filing date	Dec 18, 2008
Grant date	Sep 28, 2010
Priority date	—
Expiry date	Dec 18, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70825
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A faceted mirror apparatus includes a support plate having a plurality of stepped reception bores into which are fitted the base portions of respective ones of a plurality of mirror facets having mirrored surfaces. An outer surface of each of the facets bears on an inner wall to provide a stable alignment of the optical axes of the mirrored surfaces such that the apparatus generates a beam of rays from impinging rays.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.