Inventor · Aalen, DE

Markus Weiss

30Patents
9h-index
72Co-inventors
78Inventor score

Filing activity: Sep 24, 2001 → Apr 21, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7614857B2 Medical pump device Emerging Cross-Sectional Technologies 42 Expired
US7172055B2 Generating elevator or escalator installation fault log Performing Operations; Transporting 22 Expired
US7321126B2 Collector with fastening devices for fastening mirror shells Physics 22 Expired
US7015489B2 Collector having unused region for illumination systems using a wavelength less than or equal to 193 nm Physics 20 Expired
US7116394B2 Method for cleaning a surface of a component of a lithographic projection apparatus, lithographic projection apparatus, device manufacturing method and cleaning system Physics 19 Expired
US11423554B2 Registering a two-dimensional image with a three-dimensional image Physics 17 Active
US7354168B2 Facet mirror having a number of mirror facets Physics 13 Expired
US7473907B2 Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination Physics 11 Active
US6912077B2 Optical system Physics 10 Expired
US7460212B2 Collector configured of mirror shells Physics 9 Active
US7244954B2 Collector having unused region for illumination systems using a wavelength ≦193 nm Physics 9 Expired
US6836530B2 Illumination system with a plurality of individual gratings Physics 7 Expired
US7248667B2 Illumination system with a grating element Physics 6 Expired
US7084412B2 Collector unit with a reflective element for illumination systems with a wavelength of smaller than 193 nm Physics 5 Expired
US7875865B2 EUV illumination system with a system for measuring fluctuations of the light source Electricity 5 Active
US7362414B2 Optical system having an optical element that can be brought into at least two positions Physics 4 Expired
US7090362B2 Facet mirror having a number of mirror facets Physics 4 Expired
US7091505B2 Collector with fastening devices for fastening mirror shells Physics 3 Expired
US7246909B2 Method for the production of a facetted mirror Physics 2 Expired
US9284860B2 Valve housing for a control valve of a camshaft adjusting system, and method for producing a valve housing Emerging Cross-Sectional Technologies 2 Active
US10061292B2 Method for aligning a strip of labels Physics 2 Active
US11111903B2 Yaw auto-calibration for a wind turbine generator Emerging Cross-Sectional Technologies 1 Active
US7646004B2 Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element Physics 1 Active
US7491951B2 Lithographic apparatus, system and device manufacturing method Physics 1 Active
US8164077B2 Optical element for radiation in the EUV and/or soft X-ray region and an optical system with at least one optical element Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.