Method for local hot spot fixing
US7805692B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 15, 2007 |
| Grant date | Sep 28, 2010 |
| Priority date | — |
| Expiry date | Oct 24, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F30/398
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Efficient and cost-effective systems and methods for detecting and correcting hot spots of semiconductor devices are disclosed. In one aspect, a method includes providing an input file having a device layout; performing a hot spot detection on the input file; and then modifying the device layout based on the hot spots detected to create an output file. In another aspect, a method includes providing an input file having a device layout; selecting a first local region of the device layout; performing a first hot spot detection on the first local region; modifying the first local region based on the hot spots detected to create a first output file; and repeating for other local regions of the device layout. In some aspects, hot spots are detected by comparing parameters of the device layout with a set of hot spot rules to determine if the device layout satisfies the hot spot rules.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.