Substrate processing apparatus
US7808396B2 · kind B2 · utility
0Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2006 |
| Grant date | Oct 5, 2010 |
| Priority date | — |
| Expiry date | Aug 27, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67253
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
It is intended to provide a substrate processing apparatus capable of reliably informing a running state of the apparatus. The substrate processing apparatus 100 having a signal indicator for indicating the running state, including a signal indicator 306 capable of setting at least one operation condition under which the signal indicator 306 operates as well as of operating under any one of a plurality of operation conditions and a display unit 314 capable of displaying that a cause of the operation is any one of the operation conditions during the operation of the signal indicator 306.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.