Apparatus and method for pressure fluctuation insensitive mass flow control
US7809473B2 · kind B2 · utility
35Cited by
44References
21Claims
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Key dates
| Filing date | Dec 5, 2007 |
| Grant date | Oct 5, 2010 |
| Priority date | — |
| Expiry date | Apr 1, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/776
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A mass flow controller includes a thermal mass flow sensor in combination with a pressure sensor to provide a mass flow controller that is relatively insensitive to fluctuations in input pressure. The pressure sensor and thermal sensor respectively provide signals to an electronic controller indicating the measured inlet flow rate and the pressure within the dead volume. The electronic controller employs the measured pressure to compensate the measured inlet flow rate and to thereby produce a compensated measure of the outlet flow rate, which may be used to operate a mass flow controller control valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.