Device and method for scanning probe microscopy
US7810166B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 30, 2005 |
| Grant date | Oct 5, 2010 |
| Priority date | — |
| Expiry date | May 8, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a device for scanning probe microscopy, said device comprising a scanning microscopy measuring device provided with a measuring probe for scanning microscopy measurements and a sample carrier for receiving a sample to be measured by scanning microscopy; a control device which is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically control the measuring device in order to perform a scanning microscopy measurement according to pre-defined control parameters; and/or an evaluation device that is connected to the scanning microscopy measuring device in such a way that it is integrated into the system, and is designed in such a way as to automatically evaluate measurements according to pre-defined evaluation parameters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.