Placing a MEMS part on an application platform using a guide mask
US7811849B2 · kind B2 · utility
1Cited by
13References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 30, 2008 |
| Grant date | Oct 12, 2010 |
| Priority date | — |
| Expiry date | Sep 7, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249956
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method for fabricating a micro-electro-mechanical system (MEMS) device. The method comprises placing a guiding mask on an application platform, the guiding mask including an opening that defines the position of a MEMS part to be placed on the application platform. The method further comprises placing the MEMS part into the opening of the guiding mask on the application platform, and removing the guiding mask from the application platform after the MEMS part is bonded to the application platform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.