Tseng-Yang Hsu
10Patents
7h-index
14Co-inventors
59Inventor score
Filing activity: Mar 24, 1997 → Feb 18, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5821596A | Batch fabricated semiconductor micro-switch | Physics | 99 | Expired |
| US6243474A | Thin film electret microphone | Emerging Cross-Sectional Technologies | 95 | Expired |
| US6343178B1 | Micromachined voltage controlled optical attenuator | Physics | 60 | Expired |
| US7264984B2 | Process for forming MEMS | Performing Operations; Transporting | 45 | Expired |
| US6806593B2 | Thin film electret microphone | Emerging Cross-Sectional Technologies | 27 | Expired |
| US7928751B2 | MEMS interconnection pins fabrication on a reusable substrate for probe card application | Emerging Cross-Sectional Technologies | 19 | Active |
| US7271022B2 | Process for forming microstructures | Performing Operations; Transporting | 15 | Expired |
| US7737714B2 | Probe assembly arrangement | Emerging Cross-Sectional Technologies | 3 | Active |
| US8089294B2 | MEMS probe fabrication on a reusable substrate for probe card application | Emerging Cross-Sectional Technologies | 3 | Active |
| US7811849B2 | Placing a MEMS part on an application platform using a guide mask | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.