Patent · US Active

Techniques for providing a multimode ion source

US7812321B2 · kind B2 · utility

6Cited by

11References

12Claims

0Family size

Assignee

Varian Semiconductor Equipment Associates, Inc. · US

Inventors

Peter F. Kurunczi · Cambridge, US
Rajesh Dorai · Woburn, US
Costel Biloiu · Rockport, US
Wilhelm P. Platow · Salem, US

Key dates

Filing date	Jun 11, 2008
Grant date	Oct 12, 2010
Priority date	—
Expiry date	Feb 20, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/304
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Techniques for providing a multimode ion source are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation comprising an ion source that operates in multiple modes such that a first mode is an arc-discharge mode and a second mode is an RF mode.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.