MuGFET array layout

US7812373B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Florian Bauer · Friedberg, DE
• Klaus von Arnim · Munich, DE

Key dates

• Filing date: Feb 12, 2007
• Grant date: Oct 12, 2010
• Expiry date: Oct 6, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S257/903

Abstract

A circuit array includes a plurality cells, wherein each cell has at least one group of odd fins. The cells may be arranged in a repeating pattern that includes mirror images of the pattern. A plurality of fin forming regions are provided about which the fins are formed for the dual fin and single fin transistors.