Tip array structure and fabricating method of tip structure
US7814566B2 · kind B2 · utility
1Cited by
0References
15Claims
0Family size
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Inventor
Key dates
| Filing date | Apr 20, 2007 |
| Grant date | Oct 12, 2010 |
| Priority date | — |
| Expiry date | Jun 27, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249979
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A fabricating method of a structure having nano-hole is provided. The fabricating method includes: providing a substrate, forming a photoresist layer on the substrate, forming an opening, and performing a heat treatment process on the photoresist layer to shrink the opening to form a nano-hole. The structure having nano-hole fabricated by the method of the present invention can be used to fabricate a nano-tip having a diameter of tip-body of no more than 10 nm, high aspect ratio, and a uniform diameter of tip-body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.