Apparatus for controlling the pressure in a process chamber and method of operating same
US7814922B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 20, 2003 |
| Grant date | Oct 19, 2010 |
| Priority date | — |
| Expiry date | Apr 11, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86139
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A method of operating apparatus for controlling the pressure in a process chamber (10), the apparatus comprising a first pump unit (14) having an inlet in fluid connection with an outlet of said process chamber, and a second pump unit (16) having an inlet in fluid connection with an outlet of the first pump unit via a flow control unit (18) comprising a variable flow control device (20; 28) having variable conductance for controlling outlet fluid pressure at the outlet of the first pump unit, the method comprises controlling speed of the first pump unit to increase the range of chamber pressures over which control of the outlet fluid pressure produces changes in said chamber pressure without exceeding the thermal limit and/or motor stall limit of the first pump unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.