System, method, and apparatus for monitoring characteristics of RF power
US7822565B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2007 |
| Grant date | Oct 26, 2010 |
| Priority date | — |
| Expiry date | Dec 31, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R21/01
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system and method for monitoring RF power is described. In one embodiment the system samples RF power that is generated by an RF generator to obtain RF signals that include information indicative of electrical characteristics at a plurality of particular frequencies that fall within a frequency range. The RF signals are digitized to obtain a stream of digital RF signals that include information indicative of electrical characteristics at the plurality of particular frequencies, and the information indicative of electrical characteristics is successively transformed, for each of the plurality of particular frequencies, from a time domain into a frequency domain.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.