Method and apparatus for in situ testing of gas flow controllers
US7823436B2 · kind B2 · utility
30Cited by
11References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2009 |
| Grant date | Nov 2, 2010 |
| Priority date | — |
| Expiry date | Jan 15, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7762
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and apparatus utilize a rate of drop in pressure upstream of a gas flow controller (GFC) to accurately measure a rate of flow through the GFC. Measurement of the gas flow through the many gas flow controllers in production use today is enabled, without requiring any special or sophisticated pressure regulators or other special components. Various provisions ensure that none of the changes in pressure that occur during or after the measurement perturb the constant flow of gas through the GFC under test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.