Method of making an electrode assembly for plasma processing apparatus
US7827657B2 · kind B2 · utility
6Cited by
26References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 2009 |
| Grant date | Nov 9, 2010 |
| Priority date | — |
| Expiry date | May 7, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/4921
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of making an electrode assembly for a plasma processing apparatus includes securing a backing member to an electrode wherein first fastener members mounted in apertures in the backing member cooperate with second fastener members to hold the electrode assembly to a support member, such as a temperature-controlled top plate in a plasma processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.