Patent · US Active

Thin film scribe process

US7829356B2 · kind B2 · utility

1Cited by

4References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Fang Mei · Foster City, US
David Tanner · San Jose, US
Tzay-Fa Su · San Jose, US

Key dates

Filing date	Sep 17, 2008
Grant date	Nov 9, 2010
Priority date	—
Expiry date	Sep 17, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50

Abstract

A method and apparatus for improving a thin film scribing procedure is presented. Embodiments of the invention include a method and apparatus for determining a scribe setting for removal of an absorber layer of a photovoltaic device that improves contact resistance between a back contact layer and a front contact layer of the device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.