Patent · US Expired

Micromechanical component and corresponding production method

US7833405B2 · kind B2 · utility

6Cited by

10References

10Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Hubert Benzel · Neckartenzlingen, DE
Heribert Weber · Leverkusen, DE
Hans Artmann · Magstadt, DE
Frank Schaeffer · Lörrach, DE

Key dates

Filing date	Dec 13, 2001
Grant date	Nov 16, 2010
Priority date	—
Expiry date	Jul 14, 2022

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0178
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A micromechanical component is described which includes a substrate; a monocrystalline layer, which is provided above the substrate and which has a membrane area; a cavity that is provided underneath the membrane area; and one or more porous areas, which are provided inside the monocrystalline layer and which have a doping that is higher than that of the surrounding layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.