Patent · US Active

All surface data for use in substrate inspection

US7835566B2 · kind B2 · utility

4Cited by
16References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 9, 2009
Grant dateNov 16, 2010
Priority date—
Expiry dateSep 9, 2029

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L22/20
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A system for capturing, calibrating and concatenating all-surface inspection and metrology data is herein disclosed. Uses of such data are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.