Transportation apparatus and drive mechanism
US7837425B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 9, 2004 |
| Grant date | Nov 23, 2010 |
| Priority date | — |
| Expiry date | Feb 26, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20305
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A transfer apparatus (20) for a target substrate (W) includes a rotatable rotary base (24). First and second arm mechanisms (26, 28) are attached to the rotary base and configured to bend and stretch. Each of the first and second arm mechanisms has a proximal end arm (26A, 28A), an intermediate arm (26B, 28B), and a pick (26C, 28C) which are pivotally coupled to each other sequentially from the rotary base. The picks are disposed to support the target substrate. A link mechanism (30) is coupled to the proximal end arms of the first and second arm mechanisms to drive the first and second arm mechanisms. A first driving source (32) is disposed to rotatably drive the rotary base. A second driving source (34) is disposed to drive the link mechanism so as to bend or stretch the first and second arm mechanisms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.