Patent · US Active

Charged particle beam apparatus and method for operating a charged particle beam apparatus

US7838830B2 · kind B2 · utility

1Cited by

9References

24Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Juergen Frosien · Ottobrunn, DE
Helmut Banzhof · Poing, DE
Jacob Levin · Verona, US
Dror Shemesh · Hod HaSharon, IL

Key dates

Filing date	Oct 24, 2007
Grant date	Nov 23, 2010
Priority date	—
Expiry date	Jan 29, 2029

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31749
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A charged particle beam apparatus is provided, which comprises a charged particle beam column for generating a primary charged particle beam; a focusing assembly, such as a charged particle lens, e.g., an electrostatic lens, for focusing the primary charged particle beam on a specimen; a detector for detecting charged signal particles which are emerging from the specimen; and a deflector arrangement for deflecting the primary charged particle beam. The deflector arrangement is arranged downstream of the focusing assembly and is adapted for allowing the charged signal particles passing therethrough. The detector is laterally displaced with respect to the optical axis in a deflection direction defined by the post-focusing deflector arrangement.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.