Patent · US Active

Assembly comprising a radiation source, a reflector and a contaminant barrier

US7839482B2 · kind B2 · utility

1Cited by

1References

16Claims

0Family size

Assignee

ASML NETHERLANDS B.V. · NL

Inventors

Wouter Anthon Soer · Nijmegen, NL
Maarten Marinus Johannes Wilhelmus Van Herpen · Heesch, NL

Key dates

Filing date	May 21, 2007
Grant date	Nov 23, 2010
Priority date	—
Expiry date	Dec 10, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70916
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An assembly including a radiation reflector and a contaminant barrier is disclosed. The contaminant barrier is arranged to receive radiation from a radiation source and to reflect that radiation towards the radiation reflector, and the radiation reflector is arranged to reflect the radiation, received from the contaminant barrier, back towards the contaminant barrier.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.