Gas injector and apparatus including the same
US7846292B2 · kind B2 · utility
9Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2006 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Dec 17, 2026 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45565
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A gas injector includes: a plate including at least one first injection hole; and at least one nozzle module combined with the plate, the at least one nozzle module including at least one second injection hole connected to the at least one first injection hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.