Charged particle beam apparatus
US7847249B2 · kind B2 · utility
2Cited by
12References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2008 |
| Grant date | Dec 7, 2010 |
| Priority date | — |
| Expiry date | Dec 1, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A technology whereby removal of magnetic hysteresis is enabled in short time in parallel with a process for stage transfer, and so forth. There is executed a magnetic hysteresis removal sequence whereby current for exciting an electromagnetic coil prior to acquisition of an image is always set to a predetermined variation value against a target value, thereby obtaining information on an image, and so forth, when a diameter of a primary electron beam, converged on the specimen, becomes smaller than dimensions displayed by one pixel of an image to be acquired.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.